题目：Silicon Nanophotonic Fabrication and Integrated Devices
【报告摘要】：In the past twenty years, silicon nanophotonic technology and waveguide integrated device are greatly stimulated extensive research in semiconductor microsensors and microactuators. Silicon nanophotonic and waveguide integrated device are very significant breakthrough for traditional photonic device and system, which is not only advantage of batch processing to address the manufacturing, but also make impact in the research of quantum integrated circuits and sensors.
This talk will introduce design and fabrication of silicon nanophotonic and waveguide integrated device in different subject areas related to nanophotonic devices such as nanophotonic switches, nano-actuators and nano-tunable lasers will be discussed. Various design and fabrication issues will be introduced to explain the make of these devices using silicon nanofabrication processes. This talk will be concluded with the future trends and research directions in silicon nanophotonic technology and quantum integrated circuits.
【报告人简介】：Professor Ai-Qun Liu (A. Q. Liu) (http://nocweba.ntu.edu.sg/laq_mems/) received his PhD degree from National University of Singapore (NUS) in 1994. Currently, he is a Professor at the School of Electrical & Electronic Engineering, Nanyang Technological University (NTU).
He serves as an editor and editorial board member of several journals. He is the co-author about 200 publications including peer-reviewed journal papers and two books. He is a SPIE Fellow, OSA Fellow and RCS Fellow
School of Electrical & Electronic Engineering
Nanyang Technological University, Singapore 639798